Software for WaferSense® • ReticleSense® • In-Line Particle Sensor™

CyberSpectrum™ Software

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CyberSpectrum is a powerful yet extremely simple software with an intuitive interface providing numerical and visual feedback for real-time measurement and analysis for multiple applications.

CyberSpectrum is compatible with the new In-Line Particle Sensor™ and all WaferSense® and ReticleSense®devices for chamber gapping, leveling, wafer handoff teaching, vibration, airborne particle, relative humidity and resistance measurement.


See the Full Spectrum

  • Receive and record data in real-time on your laptop with this easy-to-use software that includes multi-touch controls.
  • Count on accurate, precise, reliable and repeatable results that save time and expense compared to traditional or legacy methods.
  • Compare past and present data as well as one tool to another easier and faster without opening an additional application with Review functionality integrated in CyberSpectrum.